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Functional ring oscillators based on stacked gate-all-around silicon nanowire transistors

At this week's 2017 International Electron Devices Meeting (IEDM), imec, the research and innovation hub in nano-electronics and digital technology, reports on multiple key process optimizations for vertically stacked gate-all-around (GAA) silicon nanowire transistors. The optimized CMOS process flow was then used to integrate, for the first time, the GAA nanowire transistors in a functional ring oscillator.
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